Flow Instruments

The mass flow controllers and meters, which measure the mass flow rate, are less influenced by the temperature and pressure as compared with mechanical flow meters and valves, and can electrically exchange information about the flow rate. They are used in a wide range of processes and equipment in the fields where high levels of accuracy, repeatability, responsiveness and cost effectiveness are required, such as semiconductors, optic fibers, various analyses, fuel cells, liquid crystal, organic electroluminescence, biotechnology, foods, environmental measurement, combustion gas control, plant facilities and examination equipment.

The flow meter (area type flow meter) has a float inside a conical cylinder (tapered tube) with the upper end larger than the lower end. The float moves up and down according to the intensity of flow, and the reading taken when the float balances indicates the flow rate. KOFLOC provides flow meters with a valve that can perform both measurement and control of the flow rate, flow meters with an alarm function and many other products.

Compact Digital MFC / MFM  MODEL EX-250S SERIES
Digital mass flow device which is adopted the own developed both stable high speed thermal sensor and small proportional solenoid valve and is realized high accuracy and quick response with RS 485 communication in spite of compact.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：5SCCM～10SLM
■Accuracy：±1%F.S.

A needle valve is the typical flow control valve that controls the flow rate based on the change of resistance of the flow channel using an acicular or rod-shaped needle to adjust the opening of the flow channel that functions as a small orifice. KOFLOC offers simple-type, precision-type and various other needle valves, and also manufactures flow controllers having a combination of a needle valve and diaphragm as well as proportional solenoid valves that electrically control the flow rate.

Pressure regulating valves are classified into reducing valves and back-pressure valves. Reducing valves are adjustment valves that make the secondary-side pressure constant when the pressure on the primary side changes, and are used at the first stage of systems in general. Meanwhile, back-pressure valves are used to keep the primary-side pressure constant by releasing the primary-side pressure when it has exceeded the set value.

Flow Meter with Precision Needle Valve MODEL RK1200 SERIES.This is a grade high precision float type flowmeter combined with a needle valve capable of very accurate flow control. It is ideal for measurement and control of minute flows.

■Fluid：
Gas　N₂,Air,H₂,He,Ar,O₂,CO₂ etc.　
Liquid　H₂O
■Flow range：
Gas　5mL/min～100L/min
Liquid　5mL/min～2L/min
■Accuracy：±2%F.S.

Precision Needle Valve w/Non-rotary Needle MODEL 2412 SERIES. This needle valve has been designed to control minute gas and liquid flows with precision and ease. Design allows the rotation of the regulating screw to transform into linear motion of the needle without subjecting the needle to gaps and/or vibrations produced by the screw, so smooth, stable flows can be ensured.

■Fluid：
Gas　N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Liquid　H₂O
■Flow range：
Gas　5mL/min～100L/min(Air at 20℃ DP:0.1MPa)
Liquid　5mL/min～2L/min(H₂O at 20℃ DP*:0.1MPa )
*DP means Operating differential pressure condition.

Precision Pressure Regulator MODEL 6600 SERIES.This is a compact, lightweight precision pressure regulator with superior repeatability to provide reliable and speedy regulations.
Since all the components are perfectly cleaned before assembly, this model is ideal for high-sensitivity instruments for analysis required for R&D activities.

■Secondary control pressure：Gas 0.01～0.6MPa(G)
■Max.flow rate：10L/min or 20L/min

All metal digital mass flow controller / mass flow meter MODEL EX-550 SERIES
All metal MFC installed the own developed stable high speed thermal sensor. SEMI standard, 106mm (or 124mm) and RS485 communication. High accuracy product realized 1.0% S.P for corrosive gas.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～5SLM
■Accuracy：±1%S.P.(25～100%F.S.)
　　　　 ±0.25%F.S.(～25%F.S.)

Multidial Type Precision Needle Valve (Ideal for restriction of flows by dial control operation) MODEL 2412M SERIES. This is an enhanced model of the KOFLOC Precision Needle Valve Model 2412 (see page 116), which now incorporates a multidial that allows the user to set desired flow rates by dial operations. This valve makes the most of the rotation-to-flow linearity and repeatability performance of the 2412 needle.
 

■Fluid：
Gas　N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Liquid　H₂O
■Flow range：
Gas　5mL/min～100L/min(Air at 20℃ DP:0.1MPa)
Liquid　5mL/min～2L/min(H₂O at 20℃ DP:0.1MPa)
*DP means Operating differential pressure condition.

Pressure Regulator for Large flow rate MODEL 6700 SERIES. This regulating valve is a larger version of our 6600 regulator.
The design is compact, yet it permits quick, reliable, high-accuracy pressure regulation in a large flow range.

■Secondary control pressure：Gas 0.01～0.6MPa(G)
■Max.flow rate：50L/min

Digital MFC / MFM with Display MODEL 8700 SERIES

Model 8700 Series is a gas flow control/measuring equipment with an integrated flow sensor developed based on the principle of the thermal flow sensor, flow control valve
(controller type) and indicator.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～100SLM
■Accuracy：±1～1.5%F.S

High-Pressure Flow Meter MODEL RK1400 SERIES This top-grade high precision, float type area flowmeter is a fruit of KOFLOC's challenge to boost the general perception currently conceived by people of flowmeter of being a "mere yardstick" into a new conception that a flowmeter is a "precision instrument." This flowmeter particularly features its uniquely precision-formed glass tube and ultra-precision ball float that ensures accurate measurements of minute flows to medium flows.

■Fluid：
Gas　N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Liquid　H₂O
■Flow range：
Gas　5mL/min～100L/min
Liquid　5mL/min～2L/min
■Accuracy：±2%F.S.

Resin Flow Meter MODEL RK20T SERIES A compact and lightweight flowmeter made of resin. Two types, one with a valve and one without a valve, are available.
These meters are designed for easy reading of flow rates and suitable for air sampling equipment, medical equipment, analysis equipment, purging systems, water treatment equipment, etc.

■Fluid：Gas Air/N₂　Liqid WATER
■Flow range：
Gas　Air/N₂　0.5～100L/min
Liquid　WATER　25～2800mL/min
■Accuracy：±6%F.S.

Variable Secondary Pressure Flow Controller MODEL 2203 SERIES.A flow controller is a differential pressure regulator designed to control minute gas flows with precision and keep a certain constant flow rate. Model 2203 Variable Secondary Pressure Flow Controller is a control valve that keeps mass flows at a constant rate under a given constant level of supply pressure even when the load pressure on the secondary side (outlet side) fluctuates, and its construction is designed so that the performance of its precision control over flows to the set flow rate is maintained by the incorporated precision needle valve without being affected by such fluctuations.

■Fluid：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Frow range：10mL/min～20L/min(Air at 20℃)

Precision Pressure Regulator for Low pressure MODEL 6610.This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy
of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

■Secondary control pressure：Gas 0.01～0.15MPa(G)
■Max.flow rate：5L/min

Standard Mass Flow Controller MODEL 3660 SERIES

Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～100SLM
■Accuracy：±1～1.5%F.S.

Flow Meter with Reed Switch MODEL RK1970/RK1975/RK1976 SERIES.These compact reed switch flowmeters developed centering the focus on cost reduction are for monitoring gas and liquid flows. Any of these models is optimum for process control of cooling water.
 

■Fluid：
Gas N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Liquid H₂O
■Flow range：
Gas　30～150L/min
Liquid　1～5L/min
■Accurcy：±5%F.S.

Variable Primary Pressure Flow Controller MODEL 2204 SERIES.Model 2204 Variable Primary Pressure Flow Controller is a control valve that always keeps flows at a constant rate under a given constant level of secondary pressure (outlet pressure) even when the primary pressure (inlet pressure) fluctuates. The built-in precision needle valve accurately controls flows to the set flow rate, including ultra-minute flows.

■Fluid： Gas： N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range： Gas 10mL/min～10L/min(Air at 20℃)

Backpressure Regulator MODEL 6800 SERIES. The backpressure valve is a kind of relief valve that keeps the pressure at the front stage of a valve constant.
It can easily and quickly control the pressure of a tank with a large buffer and remove the constant flow of a mixed gas, which cannot easily be done by general regulation valves with a subsequent
stage controlling function. This new concept of pressure regulation has been attracting much attention.

■Pressure setting： Primary side： Gas 0.01～0.6MPa(G)
■Max. flow rate：Gas：0.8L/min or 1L/min or 10L/min

Standard Mass Flow Meter MODEL 3760 SERIES

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～100SLM
■Accuracy：±1～1.5%F.S.

Low-cost Mass Flow Meter with Display MODEL 3810DSII SERIES

The Model 3810DS II is a mass flow meter with a built-in display using a time-tested flow sensor. The 3810DS II displays total flow in addition to instantaneous flow, which is an improvement on the previous model 3810DS. Just like the 3810DS, the 3810DS II is also available with flow sensor and precision needle valve built into one piece.

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～100SLM
■Accuracy：±2～3%F.S.

Flow Meter with Stand MODEL RK1310 SERIES

■Fluid：
Gas　N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Liquid　H₂O
■Flow range：
Gas　5mL/min～100L/min
Liquid　5mL/min～2L/min
■Accuracy：±2%F.S.

Multiple Flow Meter with Needle Valve (for Precision Measurement and Control for Laboratory) MODEL RK120X SERIES.

This multiple flow meter with a needle valve is made by combining several types of flow meter for controlling various flows in a laboratory. It is designed based on the RK1200, a flow meter with precision needle valve, and has been verified to have outstanding reliability.

■Fluid：N₂,Air,H₂,He,Ar,O₂,CO₂ etc
■Flow range：5mL/min～20L/min
■Accuracy：±2%F.S.

Small Proportional Solenoid Valve MODEL 3000 SERIES.The Model 3000 Series maintains flow control characteristics with hysteresis of 15% or less (full-scale current). This ultra-compact proportional solenoid valve is perfect for automatic gas flow control of gas chromatographs and various other analyzers. With its high resolution, the Model 3000 is also suitable for precision pressure control.

■Fluid：Gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.