MODEL EX-250S SERIES
Compact Digital MFC / MFM MODEL EX-250S SERIES
Digital mass flow device which is adopted the own developed both stable high speed thermal sensor and small proportional solenoid valve and is realized high accuracy and quick response with RS 485 communication in spite of compact.
■Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range:5SCCM~10SLM
■Accuracy:±1%F.S.
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Feature:
□ Lower cost but high accuracy measurment
□ High speed response and zero stability
□ 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply
□ Mediocrity D-sub 9pin
□ Gases registered in EX-250S are usable by rotary-switch
* Calculate the flow rate with conversion factor based on N2 gas
□ RoHS compliance, CE marked